Publication of US20010054691A1 publication Critical patent/US20010054691A1/en Publication of US6590703B2 publication Critical patent/US6590703B2/en Application granted granted Critical Assigned to VEECO METROLOGY, LLC reassignment VEECO METROLOGY, LLC MERGER (SEE DOCUMENT FOR DETAILS). Assignors: LINKER, FREDERICK I., PARK, SANG-II, SMITH, IAN R. Assignors: PARK, SANG-II Assigned to THERMOMICROSCOPES CORPORATION reassignment THERMOMICROSCOPES CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Priority to US09/906,985 priority Critical patent/US6590703B2/en Application filed by TM Microscopes Corp filed Critical TM Microscopes Corp Assigned to THERMOMICROSCOPES, CORP. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority claimed from US85069992A external-priority Priority claimed from US09/208,733 external-priority patent/US6057547A/en Assigned to THERMOMICROSCOPES, CORP. Original Assignee TM Microscopes Corp Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Smith Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Expired - Fee Related Application number US09/906,985 Other versions US20010054691A1 Google Patents Optical system for scanning microscopeÄownload PDF Info Publication number US6590703B2 US6590703B2 US09/906,985 US90698501A US6590703B2 US 6590703 B2 US6590703 B2 US 6590703B2 US 90698501 A US90698501 A US 90698501A US 6590703 B2 US6590703 B2 US 6590703B2 Authority US United States Prior art keywords sample probe image scanner cantilever Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. ![]() Google Patents US6590703B2 - Optical system for scanning microscope US6590703B2 - Optical system for scanning microscope
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